
The Thyro-XD provides highly accurate, rapid load resistance measurement, enabling faster detection of temperature changes and tighter process control. It has a high-power density of 188 W/in3, is optimized for semiconductor tools, and doubles the control capacity versus other available products. With convection cooling, it eliminates the need for fans, improving simplicity and reliability.
With real-time resistance measurement, the Thyro-XD SCR can prevent potential damage to resistors, reducing expensive maintenance and replacement. In addition, a five-fold increase in load voltage, load current, and output power accuracy enables the fastest compensation for input fluctuations while increasing efficiency.
The Thyro-XD provides optional EtherCat connectivity through an optional Advanced Bus Module (ABM) and interface cards and can integrate temperature feedback from multiple Advanced Energy Impac measurement pyrometers for real-time temperature control.
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