Micro-Electro-Mechanical Systems or MEMS Technology is a precision device technology that integrates mechanical elements, sensors, actuators, and electronics on a common silicon substrate through micro fabrication technology.

ICs can be thought of as the “brains” of a system and MEMS augments it with the “Senses” and “Limbs”. While the electronics are fabricated using integrated circuit (IC) batch processing techniques, MEMS uses compatible “micromachining” processes, in addition to IC fabrication processes, that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices. These systems can sense, control and actuate on microscale, and function individually or in arrays to generate effects on macroscale.

S. No
|
MEMS
|
ICs
|
1
|
3D complex structures
|
2D structures
|
2
|
Doesn’t have any basic building block
|
Transistor is basic building block of ICs
|
3
|
May have moving parts
|
No moving parts
|
4
|
May have interface with external media.
|
Totally isolated with media
|
5
|
Functions include biological, chemical, optical
|
Only electrical
|
6
|
Packaging is very complex
|
Packaging techniques are well developed.
|
Fabrication Techniques
MEMS-FABRICATION TECHNIQUES
MEMS devices use semiconductor processing technologies to produce 3D mechanical structures.
Fig. 3: A Figure Showing 3 Most Used Fabrication Technologies of MEMS

Fig. 5: A Figure Showing Different Process Steps for Surface Micromachined Cantilever


MEMS Components
MEMS COMPONENTS – EXAMPLES




Fig. 12: A Figure Showing Structure of RF MEMS (Shunt) Switches

Fig. 14: A Figure Illustrating Process Flow of Micromechanical Resonators


MEMS Packaging



MEMS Applications
Year
|
Product
|
Company
|
Category
|
1973
|
Piezoresistive Pressure Sensor
|
NS, Honeywell, Kistler
|
Mechanical Sensor
|
1984
|
Thermal Inkjet Printer
|
HP, Canon
|
Microfluidics
|
1987
|
Accelerometer(for Airbags)
|
Sensonor
|
Mechanical Sensor
|
1996
|
Video projector
|
TI
|
Optical MEMS
|
1998
|
Gyroscope
Micro-spectrometer
|
Bosch
Microparts
|
Mechanical Sensor
Optical MEMS
|
1999
|
Lab-on-a-chip
Optical Switch
|
Agilent/ Caliper
Sercalo
|
Microfluidics
Optical MEMS
|
2000
|
2D Optical Switch
|
OMM
|
Optical MEMS
|
2001
|
Microphone
|
Knowles
|
Mechanical Sensor
|
2002
|
Bolometer
3D Optical Switch
|
Ulis
Lucent
|
Optical MEMS Optical MEMS
|
2003
|
RF Switch
|
Teravicta
|
RF MEMS
|
2004
|
Inhaler nozzle
|
Microparts
|
Microfluidics
|
2005
|
Tunable Lens
|
Varioptic
|
Optical MEMS
|
2007
|
Silicon Oscillator
|
Discera
|
RF MEMS
|
2009
|
Scanner for projector
|
Microvision
|
Optical MEMS
|
And the list is growing on…
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