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Why dehumidifiers are a must-have in semiconductor manufacturing facilities

By Eileen Singh September 13, 2019

dehumidifier semiconductor manufacturingAccording to the research firm, MarketsAndMarkets, the Indian semiconductor market is forecast at USD 32.35 Bn by 2025 — growing at a CAGR of 10.1 percent between 2018 and 2025. The country is currently developing its domestic electronics system design manufacturing (ESDM) industry, with a base of more than 120 companies. About 2,000 chips are designed every year in India, as per the Department of Electronics and Information Technology (DeitY), and more than 20,000 engineers work on different aspects of chip design and verification.

Thanks, in part, to the government’s Make in India (an initiative to stimulate job creation and skill enhancement), the ESDM industry is expected to receive proposals worth Rs 10,000 crore (USD 1.5 Bn) within the next few years.

Increased demand for semiconductors in several industries, however, is affecting the pace of manufacturing in the sector. Accelerated processing without standards may lead to defects or failures. High-quality processes and equipment in manufacturing plants are critical to ensure product success.

How the environment affects semiconductors quality?
Excess humidity during the manufacturing of semiconductors typically leads to the corrosion of its circuit equipment. In fact, moisture accounts for 23 percent of lost revenue in semiconductor manufacturing. In such environments, condensation on the exterior of microchip’s circuit is likely to result in an operational malfunction in semiconductors.

How to protect semiconductors?
When manufacturing microchips or semiconductors, it is important manufacturer’s adhere to specific humidity contingencies. The materials used during processing, arrangement, and assembly are hygroscopic and highly sensitive to humidity.

Industrial dehumidifiers are one way to ensure the ideal conditions (30 percent RH at 200C). Dehumidifiers regulate relative humidity and dew point in several industrial applications, such as archive storage facilities, waste, and freshwater treatment plants, indoor breed rooms and sectors where the control of moisture is essential.

However, choosing the right dehumidifier for a plan requires careful consideration, such as plant size, air quality and other requirements.

It is important to consider the following processes and equipment during manufacturing and the potential effects of excess humidity.

Assembly. Moisture unfavorably affects the bonding process and enhances corrosion deficiencies when manufacturing integrated circuits and semiconductors. Polymer compounds, known as photoresists, are hygroscopic. These compounds are used in manufacturing circuit lines for transferring methods in semiconductors and, when in contact with moisture, these lines may break or bridge —ultimately, causing circuit malfunction.

Photolithography. Ideally, the humidity in a manufacturing facility’s photolithography room should be between 20 to 35 percent RH at 200° C. Percentages above that may result in irregular adhesion of the photoresists. This can affect surface deficiencies and create a stress crack in the product.

Wafer fabrication. During wafer manufacturing, the spinners spray developer on the wafer surface. This causes the solvent on the wafer to evaporate, producing vapor on the surface of the wafer. In turn, this also modifies the developer, causing the wafer surface to swell.

Vacuum devices. Excess humidity in an environment may also affect other plant equipment. For example, Cryopumps may become inactive due to the water vapor pressure. However, if the moisture levels are between 30 to 35 percent, the processing velocity of the equipment remains ideal.

To ensure an ideal manufacturing environment free of excess humidity, an industrial dehumidifier is key. A high-quality dehumidifier will provide long-term production benefits and cost savings by preserving the semiconductor production process.


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